Machine learning-assisted spectroscopic ellipsometry of chromium thin films for microalgae biosensing

Rapid and label-free detection of microalgae is increasingly required for environmental surveillance and bio-industrial process control, where decisions must be made from subtle interfacial changes rather than from bulk concentration alone. In this work, chromium (Cr) thin films (20-75 nm) were deposited by RF magnetron sputtering and evaluated by spectroscopic ellipsometry (SE) to develop a thickness-optimized optical transducer for microalgae biosensing. Thickness-dependent optical constants (n, k) were extracted using a Drude-Lorentz dispersion model incorporating an effective-medium roughness layer. The 75 nm film exhibited the most bulk-like and spectrally stable response with comparatively low effective loss across the visible range, while 20-30 nm films showed larger deviations attributable to microstructure- and interface-mediated scattering contributions in the ultra-thin regime. Biosensing was implemented by forming Cr/PVA and Cr/PVA + microalgae stacks and quantifying the differential phase response. The 75 nm Cr/PVA platform delivered the strongest microalgae-induced modulation, exhibiting a Δ phase shift of 40.6° within 2.65-3.20 eV, thereby identifying a high-contrast spectral window for detection. Machine learning was required because Ψ-Δ spectra are high-dimensional, nonlinear, and strongly correlated, and multilayer spectral blending (Cr/PVA/biological loading) limits reliable thresholding and linear separation. A multitask deep neural network was trained to learn the coupled Ψ-Δ response for rapid prediction, and support vector machines were used for supervised discrimination of film stacks. By converting dense SE signatures into decision-ready labels on a thickness-optimized substrate, the proposed SE-ML framework advances an intelligent, non-destructive route for rapid microalgae screening and environmental diagnostics.

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Publication Details

Journal
Biosensors and Bioelectronics
Published
2026-02-17
DOI
https://doi.org/10.1016/j.bios.2026.118543
Primary Topic
Optical Polarization and Ellipsometry
Type
article
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article

Machine learning-assisted spectroscopic ellipsometry of chromium thin films for microalgae biosensing

Takeshi Kato, Riza Ariyani Nur Khasanah, Eri Widianto, Asmida Herawati et al.
Biosensors and Bioelectronics
Optical Polarization and Ellipsometry
article

Machine learning-assisted spectroscopic ellipsometry of chromium thin films for microalgae biosensing

Takeshi Kato, Riza Ariyani Nur Khasanah, Eri Widianto, Asmida Herawati, Satoshi Iwata, Suhendra, Hao-Ting Lin, Edi Suharyadi, Iman Santoso
article en

Abstract

Rapid and label-free detection of microalgae is increasingly required for environmental surveillance and bio-industrial process control, where decisions must be made from subtle interfacial changes rather than from bulk concentration alone. In this work, chromium (Cr) thin films (20-75 nm) were deposited by RF magnetron sputtering and evaluated by spectroscopic ellipsometry (SE) to develop a thickness-optimized optical transducer for microalgae biosensing. Thickness-dependent optical constants (n, k) were extracted using a Drude-Lorentz dispersion model incorporating an effective-medium roughness layer. The 75 nm film exhibited the most bulk-like and spectrally stable response with comparatively low effective loss across the visible range, while 20-30 nm films showed larger deviations attributable to microstructure- and interface-mediated scattering contributions in the ultra-thin regime. Biosensing was implemented by forming Cr/PVA and Cr/PVA + microalgae stacks and quantifying the differential phase response. The 75 nm Cr/PVA platform delivered the strongest microalgae-induced modulation, exhibiting a Δ phase shift of 40.6° within 2.65-3.20 eV, thereby identifying a high-contrast spectral window for detection. Machine learning was required because Ψ-Δ spectra are high-dimensional, nonlinear, and strongly correlated, and multilayer spectral blending (Cr/PVA/biological loading) limits reliable thresholding and linear separation. A multitask deep neural network was trained to learn the coupled Ψ-Δ response for rapid prediction, and support vector machines were used for supervised discrimination of film stacks. By converting dense SE signatures into decision-ready labels on a thickness-optimized substrate, the proposed SE-ML framework advances an intelligent, non-destructive route for rapid microalgae screening and environmental diagnostics.

Biosensors and BioelectronicsVol. 302
Yogyakarta State University (ID), National Chung Hsing University (TW), Universitas Gadjah Mada (ID), Nagoya University Hospital (JP), Universitas Dehasen Bengkulu (ID), University of Singaperbangsa Karawang (ID), National Nuclear Energy Agency of Indonesia (ID), University of Bengkulu (ID), Nagoya University (JP)
Peace, Justice and strong institutions
Openalex Percentile: Top 55%
Optical Polarization and Ellipsometry
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