Low-Pressure Radiofrequency Discharges in Plasma-Chemical Processes

This study investigated the modification of the surfaces of VT6 and VK15 alloys and Kh13 steels using low-energy ion beams in the energy range of 30–100 eV generated from a low-pressure (13–140 Pa) RF discharge with gas flow in an Ar, N2, O2, or propane–butane medium. It has been found that plasma treatment alters the composition of the surface layer, cleansing it, increases the adhesion strength of the galvanized coating, improves microhardness by a factor of 1.5–2, reduces roughness by 2 to 3 grades, and creates compressive residual stresses in the surface layer.