Enhanced plasma-resistant Y2O3-Al2O3-B2O3 glasses via YF3, CaF2, and MgF2 fluoride substitution: structural, thermal and mechanical properties

In this study, a Y 2 O 3 -Al 2 O 3 -B 2 O 3 glass with enhanced plasma resistance was fabricated by substituting Y 2 O 3 with YF 3 and alkaline-earth fluorides (CaF 2 and MgF 2 ). The correlation between the bonding-structure modifications induced by fluorides substitution and the thermal (based on differential thermal analysis and the coefficient of thermal expansion), physical(density) and mechanical properties (hardness) of the glass were systematically investigated. Raman spectroscopy revealed band shifts and intensity variations resulting from the formation of non-bridging oxygen and band decomposition induced by F ions and alkaline-earth elements. Plasma resistance evaluation using CF 4 /Ar/O 2 gases, the developed glass exhibited superior plasma resistance to quartz glass. Furthermore, the microstructure and surface roughness of the glass after plasma etching remained similarly from those before etching, and X-ray photoelectron spectroscopy depth analysis confirmed the presence of fluorine bonding associated with each element. Glass with decreased B 2 O 3 /Al 2 O 3 ratio and YF 3 substitution exhibited an etch rate of 20.61 nm/min. • Plasma resistance enhanced by fluoride(YF 3 , CaF 2 and MgF 2 ) substitution in Y 2 O 3 -Al 2 O 3 -B 2 O 3 glass. • Non-bridging oxygen induced changes in thermal, physical and mechanical properties. • Raman spectra confirmed increased non-bridging oxygen in the glass network. • Reduced B 2 O 3 /Al 2 O 3 ratios and YF 3 -substitution glasses showed superior plasma resistance.