Research on structural reinforcement of AlGaN/GaN HEMT devices under RF stress

This study investigates the performance and reliability of AlGaN/GaN high electron mobility transistors under radio frequency (RF) stress through a device-level simulation of a commercial power amplifier. By analyzing the electrical characteristics, breakdown voltage, and RF performance under normal operation and before/after RF stress, we examined the influence of key structural parameters on the device's resistance to RF stress. The parameters studied include the passivation layer thickness, the gate-to-drain to gate-to-source length ratio (Lgd:Lgs), and the buried gate depth. Specifically, an increase in the passivation layer thickness from 0.095<i>μ</i>m to 0.245<i>μ</i>m resulted in a relatively limited improvement in RF stress resistance of 3.45%. In contrast, a variation inLgd:Lgsfrom 2:1 to 1:2 and an increase in the buried gate depth from 1 nm to 3 nm led to more pronounced enhancements of 38.3% and 44.4%, respectively. Finally, TCAD simulation results visually illustrate the extent of improvement in RF stress resistance achieved through each structural modification.

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Publication Details

Journal
Nanotechnology
Published
2026-02-13
DOI
https://doi.org/10.1088/1361-6528/ae45b0
Primary Topic
GaN-based semiconductor devices and materials
Type
article
Field-Weighted Citation Impact
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Research on structural reinforcement of AlGaN/GaN HEMT devices under RF stress

Dong Xing, Xingjun Liu, Mengwei Su, Chang Liu et al.
Nanotechnology
GaN-based semiconductor devices and materials
article

Research on structural reinforcement of AlGaN/GaN HEMT devices under RF stress

Dong Xing, Xingjun Liu, Mengwei Su, Chang Liu, Hongxia Liu
article en

Abstract

This study investigates the performance and reliability of AlGaN/GaN high electron mobility transistors under radio frequency (RF) stress through a device-level simulation of a commercial power amplifier. By analyzing the electrical characteristics, breakdown voltage, and RF performance under normal operation and before/after RF stress, we examined the influence of key structural parameters on the device's resistance to RF stress. The parameters studied include the passivation layer thickness, the gate-to-drain to gate-to-source length ratio (Lgd:Lgs), and the buried gate depth. Specifically, an increase in the passivation layer thickness from 0.095<i>μ</i>m to 0.245<i>μ</i>m resulted in a relatively limited improvement in RF stress resistance of 3.45%. In contrast, a variation inLgd:Lgsfrom 2:1 to 1:2 and an increase in the buried gate depth from 1 nm to 3 nm led to more pronounced enhancements of 38.3% and 44.4%, respectively. Finally, TCAD simulation results visually illustrate the extent of improvement in RF stress resistance achieved through each structural modification.

NanotechnologyVol. 37(8)
Xidian University (CN), China Electronic Product Reliability and Environmental Test Institute (CN)
Affordable and clean energy
Openalex Percentile: Top 54%
GaN-based semiconductor devices and materials
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