Near-infrared on-chip hollow-core waveguide C <sub>2</sub> H <sub>2</sub> sensing using hybrid chalcogenide/PDMS anti-resonant reflecting structure
To increase the operating bandwidth and enhance gas absorption, we developed a hybrid chalcogenide glass (ChG)/polydimethylsiloxane (PDMS) anti-resonant reflecting hollow-core waveguide for C<sub>2</sub>H<sub>2</sub> detection based on near-infrared absorption spectroscopy. ChG/SiO<sub>2</sub> and RN-218/air anti-resonant bilayers combined with PDMS upper cladding are used to enhance light-gas interaction and broaden anti-resonant bandwidth. The simplified fabrication process includes plasma-enhanced chemical vapor deposition (PECVD), thermal evaporation, and one-step lithography. The proposed hybrid hollow-core ARROW achieves external confinement factors of 101.9% and a limit of detection of 25.13 parts-per-million (ppm) at an averaging time of 178 s using intensity modulation spectroscopy (IMS) techniques, with an anti-resonant bandwidth exceeding 200 nm, highlighting its potential for miniaturized on-chip gas sensing applications.
Authors
- Yuting Min (ORCID: https://orcid.org/0009-0004-5981-6191)
- Mingquan Pi
- Chuantao Zheng Chuantao Zheng
- Xue Bai
- Zhize Li
- Ningno Ma
- Fang Song
- Yiding Wang
- Boren Zhang
- Xinyu Zhang
- Lei Liang
- Yu Wei Zhang
Institutions
- Changchun Institute of Optics, Fine Mechanics and Physics (CN)
- Electronics Testing Center (TW)
Publication Details
- Journal
- Optics Express
- Published
- 2026-02-12
- DOI
- https://doi.org/10.1364/oe.589763
- Primary Topic
- Advanced Fiber Optic Sensors
- Type
- article
- Field-Weighted Citation Impact
- 0.00