Reliability evaluation of MEMS scanning mirrors with an embedded mirror-monitoring sensor under external random vibrations

We propose a quantitative metric, the Index of Vibration Influence (IVI), to assess how external random vibrations affect resonant MEMS scanning mirrors that embed a mirror-angle sensor. The setup excites the mirror with PSD-specified random profiles while the mirror is driven near its resonant frequency. The IVIo, which quantifies vibration‑induced scan‑angle perturbations, is defined at the operating frequency (fo), as the ratio of the mirror-angle spectra influenced by external vibration to those without random vibration. We validate the linearity error of the embedded sensor as small as 1.25% compared with an external PSM. Using the validated sensor, IVIo was evaluated at − 45 dB, corresponding to 0.17° angle perturbations at 30.18° OSA, when random vibration was applied at an acceleration level 30% higher in RMS than the IEC 62,498‑3 requirement.