Development of an Ultra-precision Air-bearing Stage Integrated with Real-time Motion Error Measurement and Compensation Functions

This study details the development of an ultra-precision air-bearing stage that integrates real-time motion error measurement and compensation features. The motion errors addressed include horizontal and vertical straightness errors, as well as roll, pitch, and yaw errors. These errors are measured by an embedded system that incorporates five capacitive sensors and a reference mirror within the stage. A key advantage of this stage is its capability to perform real-time compensation using the internal measurement system and on-stage pneumatic regulators, eliminating the need for external measurement and compensation devices. Experimental results show a significant reduction in motion errors, with horizontal and vertical straightness errors decreasing from 3.09 and 1.95 μm to 0.29 and 0.25 μm, respectively. Additionally, roll, pitch, and yaw errors were reduced from 3.18, 3.45, and 4.93 arcsec to 0.35, 0.41, and 0.49 arcsec, respectively. These results clearly demonstrate the effectiveness of the proposed approach.