A high-efficiency laser processing array micro-holes method based on acousto-optic deflector and galvanometer hybrid

Array micro-holes have been widely used as optical apertures for ambient light sensors in display panels. Existing galvanometer processing method suffers from inefficient fabrication of the vast number of micro-holes (< 30 μm) due to the scanning speed limitations imposed by the mechanical inertia of mirror oscillation. To address this issue, a laser processing method based on acousto-optic deflector (AOD) and galvanometer hybrid is proposed, centered on a discrete-trajectory partitioning framework tailored for discontinuous, high-density point arrays. The galvanometer trajectory is derived from processing area divided by fully exploiting the AOD scanning field, reducing the path length and number of galvanometer jumps. The target trajectory is determined by pulse distribution from micro-holes, and the AOD displacements are derived through coordinate transformation to the result of positional vector subtraction. The experimental results indicated that compared with galvanometer-only processing, the maximum galvanometer following errors of proposed method are reduced by up to 89.8% with better consistency and higher processing quality. Meanwhile, the total processing time of given drawings decreased from 2.157–3.813 s to 0.487–0.875 s, reduced by up to 77.4%.