Commissioning of the linear accelerator for the extreme ultraviolet synchrotron of the Pohang Accelerator Laboratory

Pohang Accelerator Laboratory (PAL) constructed a novel extreme ultraviolet (EUV) radiation generation synchrotron facility. We call this facility the Extreme Ultraviolet Synchrotron of the Pohang Accelerator Laboratory (PAL-EUV). The PAL-EUV facility consists of a linear accelerator, a booster synchrotron, and a storage ring synchrotron. Due to spatial constraints, these devices were installed very densely. For this reason, it is important to design the transport section from the linear accelerator to the booster synchrotron to be compact and efficient. Under this condition, we designed the electron beam transport section such that the dispersion of the electron beam is zero as it passes through the horizontal and vertical bending magnets. We installed diagnostic devices, including beam position monitors, screen monitors, a dark current monitor, and an electron beam spectrometer. We conducted commissioning using these devices. In this paper, we provide a detailed description of the structure and devices of the PAL-EUV linear accelerator and present the commissioning procedures and results.