Розроблення алгоритмів розпізнавання дефектів у структурі кодової послідовності на поверхні модуляційних дисків

This study investigates algorithms for detecting and localizing defects in code sequence structures on modulation disk surfaces. It targets small anomalies in lithographically patterned elements that can cause readout errors or reduced measurement accuracy. A multi-level image-processing model combines Gaussi-an smoothing, adaptive thresholding, morphological operations, and contour-based segmentation. Processing stages are formalized as mathematical operators for reproducible implementation. Defects are characterized using perimeter- and area-based metrics, and their area distribution is approximated by a normal law. A spatial model computes defect centroids, enabling comparative quality as-sessment of disk samples. The software provides an interface for tuning thresh-olds, visualizing contours and defect-area plots, and exporting results. Tests on real defective disks confirm the method’s reliable detection of local structural violations and its suitability for diagnostic systems.

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Publication Details

Journal
The Scientific Issues of Ternopil Volodymyr Hnatiuk National Pedagogical University Series pedagogy
Published
2025-12-29
Primary Topic
Advancements in Photolithography Techniques
Type
article
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article

Розроблення алгоритмів розпізнавання дефектів у структурі кодової послідовності на поверхні модуляційних дисків

Андрій Крючин, Руслан Іщенко, Євген Беляк, Валентина Заварзіна et al.
The Scientific Issues of Ternopil Volodymyr Hnatiuk National Pedagogical University Series pedagogy
Advancements in Photolithography Techniques
article

Розроблення алгоритмів розпізнавання дефектів у структурі кодової послідовності на поверхні модуляційних дисків

Андрій Крючин, Руслан Іщенко, Євген Беляк, Валентина Заварзіна, Дмитро Манько
article en

Abstract

This study investigates algorithms for detecting and localizing defects in code sequence structures on modulation disk surfaces. It targets small anomalies in lithographically patterned elements that can cause readout errors or reduced measurement accuracy. A multi-level image-processing model combines Gaussi-an smoothing, adaptive thresholding, morphological operations, and contour-based segmentation. Processing stages are formalized as mathematical operators for reproducible implementation. Defects are characterized using perimeter- and area-based metrics, and their area distribution is approximated by a normal law. A spatial model computes defect centroids, enabling comparative quality as-sessment of disk samples. The software provides an interface for tuning thresh-olds, visualizing contours and defect-area plots, and exporting results. Tests on real defective disks confirm the method’s reliable detection of local structural violations and its suitability for diagnostic systems.

The Scientific Issues of Ternopil Volodymyr Hnatiuk National Pedagogical University Series pedagogy
Peace, Justice and strong institutions
Openalex Percentile: Top 37%
Advancements in Photolithography Techniques
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