Розроблення алгоритмів розпізнавання дефектів у структурі кодової послідовності на поверхні модуляційних дисків
This study investigates algorithms for detecting and localizing defects in code sequence structures on modulation disk surfaces. It targets small anomalies in lithographically patterned elements that can cause readout errors or reduced measurement accuracy. A multi-level image-processing model combines Gaussi-an smoothing, adaptive thresholding, morphological operations, and contour-based segmentation. Processing stages are formalized as mathematical operators for reproducible implementation. Defects are characterized using perimeter- and area-based metrics, and their area distribution is approximated by a normal law. A spatial model computes defect centroids, enabling comparative quality as-sessment of disk samples. The software provides an interface for tuning thresh-olds, visualizing contours and defect-area plots, and exporting results. Tests on real defective disks confirm the method’s reliable detection of local structural violations and its suitability for diagnostic systems.
Authors
- Андрій Крючин
- Руслан Іщенко
- Євген Беляк
- Валентина Заварзіна
- Дмитро Манько
Publication Details
- Journal
- The Scientific Issues of Ternopil Volodymyr Hnatiuk National Pedagogical University Series pedagogy
- Published
- 2025-12-29
- Primary Topic
- Advancements in Photolithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00