Amorphous silicon carbide for microstructured optics
Amorphous silicon carbide offers unique properties for the optimization of microstructured optical elements. We present a study on the technological processing, the resulting material properties as well as potential applications.
Authors
- Stefan Sinzinger (ORCID: https://orcid.org/0000-0001-8031-4787)
- Julian Wüster (ORCID: https://orcid.org/0000-0002-9925-7097)
- Thomas Handte
- Patrick Feßer
Publication Details
- Journal
- Springer Link (Chiba Institute of Technology)
- Published
- 2025-09-22
- DOI
- https://doi.org/10.1051/epjconf/202533508002/pdf
- Primary Topic
- Thin-Film Transistor Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00