Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition

Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have experienced rapid and sustained development in recent years and have become key enabling technologies for intelligent sensing [...].

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Publication Details

Journal
Micromachines
Published
2026-02-02
DOI
https://doi.org/10.3390/mi17020205
Primary Topic
Mechanical and Optical Resonators
Type
article
Field-Weighted Citation Impact
0.00
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article

Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition

Takahito Ono, Ching-Liang Dai, Zhi-Xuan Dai
Micromachines
Mechanical and Optical Resonators
article

Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition

Takahito Ono, Ching-Liang Dai, Zhi-Xuan Dai
article en

Abstract

Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have experienced rapid and sustained development in recent years and have become key enabling technologies for intelligent sensing [...].

MicromachinesVol. 17(2)
National Chung Hsing University (TW), Tohoku University (JP)
Industry, innovation and infrastructure
Openalex Percentile: Top 67%
Mechanical and Optical Resonators
DOIOpen Access PDFOpenAlex
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Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition — Takahito Ono, Ching-Liang Dai, et al. · Micromachines (2026) | TGRS Research Map | TGRS