High Harmonic Generation driven Extreme Ultraviolet 0
We introduce a tabletop high harmonic generation (HHG) scatterometry technique to extract structural and material characteristics of periodic nanostructures. Grazing incidence reflection scatterometry enables fast and robust measurements of linewidth and groove height with 20 nm and 2 nm precision respectively, paving the way for ultrafast spectroscopy on layered heterostructures.
Authors
- Maximilian Lipp (ORCID: https://orcid.org/0000-0002-5884-6995)
- Emmanouil Kechaoglou (ORCID: https://orcid.org/0000-0003-1836-0269)
- Zhonghui Nie
- Francesco Corazza (ORCID: https://orcid.org/0000-0002-2390-9108)
- Leo Guery
- Peter Kraus
- Lyuba Amitonova
Publication Details
- Journal
- Springer Link (Chiba Institute of Technology)
- Published
- 2025-09-22
- DOI
- https://doi.org/10.1051/epjconf/202533503020/pdf
- Primary Topic
- Optical Coatings and Gratings
- Type
- article
- Field-Weighted Citation Impact
- 0.00