Nanoscale Calibration Standards for On-Wafer S-Parameters measurements up to 110 GHz

We report the first experimental results on the design and fabrication of nanoscale on-wafer calibration standards operating up to 110 GHz. The propagation constant and effective permittivity of coplanar waveguide (CPW) transmission lines (TLs) are extracted from raw S-parameters using the Thru-Reflect-Line (TRL) method. Experimental data show deviations in extracted propagation characteristics when comparing nanostructures to microscale structures.