Integration and electrical evaluation of WS2 and MoS2 fets in a 300 mm pilot line

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Publication Details

Journal
Discover Electronics
Published
2026-02-01
DOI
https://doi.org/10.1007/s44291-026-00164-4
Citations
1
Primary Topic
2D Materials and Applications
Type
article
Field-Weighted Citation Impact
16.08
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article

Integration and electrical evaluation of WS2 and MoS2 fets in a 300 mm pilot line

Q Smets, D Cott, B Groven, P Morin et al.
1 citations
Discover Electronics
2D Materials and Applications
16.08
article

Integration and electrical evaluation of WS2 and MoS2 fets in a 300 mm pilot line

Q Smets, D Cott, B Groven, P Morin, H M Medina, P. Pramod Kumar, A Kruv, A Opdebeeck, T Schram, G. S. Kar, J.-F deMarneffe, C. J. Lockhart de la Rosa, L Panarella, H Dongre, S Ghosh, L F Pinotti
article en
1 citations

Abstract

No abstract available for this paper.
Discover ElectronicsVol. 3(1)
IMEC (BE), KU Leuven (BE)
Industry, innovation and infrastructure
Openalex Percentile: Top 2%
2D Materials and Applications
16.08
DOIOpen Access PDFOpenAlex
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