Unlocking High-Performance Si RF Platforms with SiGe HBT and RFSOI Switch Technologies
This work demonstrates key solutions for the ultimate cointegration of SiGe HBT, PDSOI switches and high-quality passives with 3D sequential integration. A Local Trap Rich (LTR) with RF isolation comparable to the state-of the-art TR substrate, and a bulk SiGe HBT withstanding the top tier thermal budget are shown. A high-performance RFSOI switch processed at 600°C featuring R<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ON</inf>×C<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">OFF</inf>=96fs & RF<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Vmax</inf>=2.7V is also demonstrated, which is a major breakthrough. Together, these results pave the way towards a fully monolithic Silicon Front-End Module (FEM) for advanced efficient and cost-effective RF systems.
Authors
- P. Gouraud (ORCID: https://orcid.org/0009-0006-9762-8022)
- Nicolas Guitard
- Jérôme Prouvée
- P. Chevalier (ORCID: https://orcid.org/0000-0003-1848-9986)
- T. Fache
- L. Lucci
- P. Batude
- S. Kerdilès (ORCID: https://orcid.org/0000-0002-6437-172X)
- M. Grégoire (ORCID: https://orcid.org/0000-0002-8220-794X)
- F.-X. Darras
- Thomas Bordignon
- Laurent Lachal
- Pablo Acosta-Alba (ORCID: https://orcid.org/0000-0003-1965-8067)
- M. Perrosé (ORCID: https://orcid.org/0009-0007-4940-1752)
- Adrien Estellon
- O. Adami
- O. Richard
- B. Mohamad
- X. Garros
- D. Gloria
- F. Monsieur
- A. Pavlovsky
- S. Boughaleb
- M. Ribotta
- F. Morris-Anak
Institutions
- Commissariat à l'Énergie Atomique et aux Énergies Alternatives (FR)
- STMicroelectronics (France) (FR)
- Laboratoire d'Électronique des Technologies de l'Information (FR)
- Université Grenoble Alpes (FR)
Publication Details
- Published
- 2025-12-06
- DOI
- https://doi.org/10.1109/iedm50572.2025.11353843
- Citations
- 1
- Primary Topic
- Radio Frequency Integrated Circuit Design
- Type
- article
- Field-Weighted Citation Impact
- 0.73