Fast Prototyping Ceramic Gas Flow Sensors for Harsh Operating Conditions
The technology development for the mass ceramic gas flow sensor (CGFS) adopted for harsh operating conditions is presented. The main characteristic of this technology is its simplicity and affordability for mass fast prototyping of CGFS with a limited set of technological equipment. Special attention is paid to the discussion of the technological and operational materials' compatibility, flexibility, and speed of their processing to adapt the best mass flow sensor design option. The CGFS, designed and manufactured in just a few days, was tested in conditions close to the real ones and demonstrated the ability to measure gas flow in the range from 0.21 m/s to 1.25 m/s, with a constant power consumption of 152 mW@346 °C.
Authors
- Konstantin Oblov (ORCID: https://orcid.org/0000-0003-1679-7563)
- Pavel A. Shchur
- Vasily V. Egorov
- Arthur Litvinov
- Nikolay Samotaev
- Ivan Borzunov
- Andrey Kasenko
- Ekaterina Anatolevna Drach
- Boris Prudnikov
- Yuri Voronov
Institutions
- Intersil (United States) (US)
- National Research Nuclear University MEPhI (RU)
Publication Details
- Journal
- Micromachines
- Published
- 2026-01-30
- DOI
- https://doi.org/10.3390/mi17020188
- Primary Topic
- Electrical and Thermal Properties of Materials
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Ministry of Science and Higher Education of the Russian Federation