Development of an Active Micromagnetic Bearing with a 300 μm Outer Diameter Permanent Micromagnet

Micromachines, MEMS and actuators suffer from much more significant relative friction and wear issues than their equivalent macroscopic devices. Active magnetic bearings can be a good option to mitigate friction issues; however, their construction at microscale is still an open research topic. In this work, we have developed a micrometric-size active magnetic bearing with a simple configuration and one vertical degree of freedom. This active magnetic microbearing is composed of a coreless coil with 1 mm outer diameter, 0.3 mm inner diameter and 0.5 mm length that holds a 0.3 mm outer diameter, 0.5 mm length NdFeB N52 micromagnet. Stable magnetic levitation is achieved by regulating the coil current based on precise position measurements of the magnet obtained using the smallest commercially available Hall-effect microsensor. The microprobe integrates between the coil and magnet, reducing the total size of the device. A maximum axial load capacity of 1.16 mN/A has been demonstrated. This micromagnetic bearing is one of the smallest active magnetic bearings developed to date, demonstrating the viability of this kind of system at the micrometric scale.