Fabrication of a Hybrid Structure using Photosensitive Polyimide and Nanoimprinting

The moth-eye structure is employed in biomimetics and exhibits anti-reflection properties and enhanced wettability. The moth-eye structure is lined with nanopillars and has various industrial applications requiring the prevention of light reflection from surfaces. In this study, moth-eye structures were fabricated on a photosensitive polyimide (PI) surface and used as a mold to replicate moth-eye structures by performing ultraviolet nanoimprint lithography (UV-NIL). In addition, hybrid structures were fabricated using micropatterned photosensitive PI with a moth-eye structure. Micropatterns for the photosensitive PI were fabricated using photolithography. The moth-eye structure was formed by irradiating the PI surface with an oxygen-ion beam. The reflection of the moth-eye-structured PI and the replicated moth-eye structure was 0.5% at visible-light wavelengths. A micropatterned PI mold with a moth-eye structure was also fabricated and replicated using UV-NIL. The replicated pattern retained the inverted hybrid structure.