Correction: Ye, G.; Yao, Z. Research on the Trajectory and Relative Speed of a Single-Sided Chemical Mechanical Polishing Machine. Micromachines 2025, 16, 450
Authors
- Guoqing Ye
- Zhenqiang Yao
Institutions
- Shanghai Jiao Tong University (CN)
Publication Details
- Journal
- Micromachines
- Published
- 2026-01-26
- DOI
- https://doi.org/10.3390/mi17020160
- Primary Topic
- Advanced Surface Polishing Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00