Correction: Ye, G.; Yao, Z. Research on the Trajectory and Relative Speed of a Single-Sided Chemical Mechanical Polishing Machine. Micromachines 2025, 16, 450

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Journal
Micromachines
Published
2026-01-26
DOI
https://doi.org/10.3390/mi17020160
Primary Topic
Advanced Surface Polishing Techniques
Type
article
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Correction: Ye, G.; Yao, Z. Research on the Trajectory and Relative Speed of a Single-Sided Chemical Mechanical Polishing Machine. Micromachines 2025, 16, 450

Guoqing Ye, Zhenqiang Yao
Micromachines
Advanced Surface Polishing Techniques
article

Correction: Ye, G.; Yao, Z. Research on the Trajectory and Relative Speed of a Single-Sided Chemical Mechanical Polishing Machine. Micromachines 2025, 16, 450

Guoqing Ye, Zhenqiang Yao
article en

Abstract

No abstract available for this paper.
MicromachinesVol. 17(2)
Shanghai Jiao Tong University (CN)
Openalex Percentile: Top 76%
Advanced Surface Polishing Techniques
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Correction: Ye, G.; Yao, Z. Research on the Trajectory and Relative Speed of a Single-Sided Chemical Mechanical Polishing Machine. Micromachines 2025, 16, 450 — Guoqing Ye, Zhenqiang Yao · Micromachines (2026) | TGRS Research Map | TGRS