A Nanopackage for Silicon Nanowire-Based Sensor Applications

This paper describes the design of a silicon nanowire-based sensor chip and optimization of various parameters and recipes such as photolithography and e-beam deposition. We describe on packaging issues with nanometer thickness metal deposition. The electrical response of the silicon nanowire integrated sensor array was studied by electrical current (IV) analysis. The sensors are designed to detect chemicals and biomolecules, potentially acting as a novel biosensor for biomedical diagnosis in the future.