Development of optical beam scanner for FMCW LiDAR application

Abstract Solid-state beam scanner with a low total insertion loss of 4.04 dB was developed using a silica arrayed waveguide grating based on optical phased array (OPA). This 64-channel OPA, combined with a digital MEMS, achieves 2D beam steering via wavelength tuning in C-band, providing a field-of-view (FOV) of 15.8°( H ) × 12°( V ). A compact lens relay system expands the FOV to 76.58°( H ) × 48°( V ) without degrading beam profile. Using this optical beam scanner, synchronous transceiving for frequency modulated continuous wave ranging is demonstrated with a single OPA chip serving simultaneously as transmitter (Tx) and receiver (Rx), highlighting its potential for future light detection and ranging sensors.