Predictive Modeling in Semiconductor Manufacturing: A Systematic Review of Cycle Time Prediction, Anomaly Detection, and Digital Twin Integration

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Published
2025-12-07
DOI
https://doi.org/10.1109/wsc68292.2025.11338987
Primary Topic
Digital Transformation in Industry
Type
article
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Predictive Modeling in Semiconductor Manufacturing: A Systematic Review of Cycle Time Prediction, Anomaly Detection, and Digital Twin Integration

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Predictive Modeling in Semiconductor Manufacturing: A Systematic Review of Cycle Time Prediction, Anomaly Detection, and Digital Twin Integration

Adrien Wartelle, T.-E. Korabi, J. J. R. M. van Heugten, Claude Yugma, Renaud Roussel, Pascal Robert, Stéphane Dauzère-Pérès
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Abstract

No abstract available for this paper.
Mines Saint-Étienne (FR), STMicroelectronics (France) (FR), Santa Cruz County Office of Education (US)
Openalex Percentile: Top 29%
Digital Transformation in Industry
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