Simulation of a Semiconductor Manufacturing Research and Development Cleanroom

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Published
2025-12-07
DOI
https://doi.org/10.1109/wsc68292.2025.11339098
Primary Topic
Heat Transfer and Numerical Methods
Type
article
Field-Weighted Citation Impact
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article

Simulation of a Semiconductor Manufacturing Research and Development Cleanroom

Valéria Borodin, Agnès Roussy, Baptiste Loriferne, Vincent Fischer et al.
Heat Transfer and Numerical Methods
article

Simulation of a Semiconductor Manufacturing Research and Development Cleanroom

Valéria Borodin, Agnès Roussy, Baptiste Loriferne, Vincent Fischer, Gaëlle Berthoux
article en

Abstract

No abstract available for this paper.
Centre National de la Recherche Scientifique (FR), Commissariat à l'Énergie Atomique et aux Énergies Alternatives (FR), Mines Saint-Étienne (FR), CEA Grenoble (FR), Laboratoire des Sciences du Numérique de Nantes (FR), Direction de la Recherche Technologique (FR), IMT Atlantique (FR), Université Grenoble Alpes (FR)
Industry, innovation and infrastructure
Openalex Percentile: Top 32%
Heat Transfer and Numerical Methods
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Simulation of a Semiconductor Manufacturing Research and Development Cleanroom — Valéria Borodin, Agnès Roussy, et al. · (2025) | TGRS Research Map | TGRS