A Hybrid Piezoelectric–Capacitive MEMS Microphone With Peripheral Electrostatic Transduction
sponsorship: This work was supported in part byChina Scholarship Council (CSC) under Grant CSC 202006320040 andin part by the Micro- and Nano-Systems Group Headed by Prof. MichaelKraft. (China Scholarship Council|CSC 202006320040, Micro- and Nano-Systems Group)
Authors
- Christ Glorieux (ORCID: https://orcid.org/0000-0001-7740-5215)
- Yangyang Guan (ORCID: https://orcid.org/0000-0002-6973-1886)
- Sina Sadeghpour (ORCID: https://orcid.org/0000-0002-7575-2763)
- Milad Shojaeian (ORCID: https://orcid.org/0000-0003-2394-0970)
- Hemin Zhang (ORCID: https://orcid.org/0000-0002-1067-1137)
- Michael Kraft
- Chengxin Li
- Chen Wang
Institutions
- Northwestern Polytechnical University (CN)
- KU Leuven (BE)
Publication Details
- Journal
- IEEE Transactions on Electron Devices
- Published
- 2026-01-21
- DOI
- https://doi.org/10.1109/ted.2026.3650885
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00