Склад, структура та мікротвердість багатокомпонентних покриттів на основі карбіду вольфраму, сформованих методом інверсного магнетронного розпилення

The subject of research is the processes of forming multicomponent coatings based on tungsten car-bide (WC) by sputtering of elements by the ion-plasma method. The aim is to study the influence of metals from the composition of its structural parts on the structure and microhardness of WC coatings formed using an ion-plasma spray system. The task is to study the effect of metals from the composition of the structural parts of the magnetron sputtering system on the period of the crystal lattice, the size of the coherent scattering region X-rays and the microhardness of WC coatings. The methods used in the research: X-ray diffraction analysis, scanning electron microscopy and microhardness. The results obtained: coatings based on WC coatings with a thickness of 3-6 microns. The coatings also contain the following elements: Fe, Mo, Cr, Ni, Ti, and O. Content of  W in the samples varies widely. Moreover, with a decrease of this element, the iron content increases. At the same time, the chromium content varies slightly from sample to sample. Nickel and titanium are found only in in some samples. It was found that the structure of the coatings belongs to the B1 type, the spatial group is №225. In all samples the lattice parameter of tungsten carbide lattice parameter of tungsten carbide significantly exceeds the value known from the literature (a = 4,215Å). An important feature of the studied coating samples is the presence of a (200) texture in most of them. With an increase in the area of ​​coherent scattering of X-rays, a tendency towards a decrease in the crystal lattice period and microhardness of the coatings is observed. Conclusions. The scientific novelty of the obtained results lies in the fact that for the first time the influence of metals from the composition of the structural parts of the inverted magnetron sputtering system on the crystal lattice period, the size of the coherent X-ray scattering region, and the microhardness of WC coatings has been established. At the same time, for the entire set of samples coatings, these parameters correlate with each other. The data obtained indicate the prospects for controlling a wide range of physical and technical properties of multicomponent coatings based on tungsten carbide during their formation using inverse magnetron sputtering systems with sectioned cathode units.