Experimental study of the measurement error of a matrix-displacement meter

Subject of study . The paper presents the results of an experimental study of a linear–angular measurement technology incorporating a multi-element 2D measuring mark and a video camera. Aim of study. The aim was to experimentally confirm the possibility of reducing the random error of matrix-displacement to a few nanometers. Method. Linear displacement measurements were performed via cross-calibration on a two-channel setup with two identical matrix-displacement meters sharing a common linear translator. 1.3 Mpx CMOS digital cameras were used as image analyzers. Main results. The total random error of the meters was determined from the difference between the measurement results in both channels. The results indicated that the random error of the studied matrix meters did not exceed 2 nm. This is the first such observation for a displacement range of 4 mm. Practical significance. This study demonstrates the potential of matrix measurement technology in reducing the random measurement error in displacements to a few nanometers for displacement ranges up to 4 mm.