On the plasma etching mechanisms of high aspect ratio aluminum nitride nanowires patterning

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SPIRE - Sciences Po Institutional REpository
Published
2024-11-03
Primary Topic
Optical Coatings and Gratings
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article
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On the plasma etching mechanisms of high aspect ratio aluminum nitride nanowires patterning

Lucas Jaloustre, Erwine Pargon, Saron Sales de Mello, Camille Petit-Etienne et al.
SPIRE - Sciences Po Institutional REpository
Optical Coatings and Gratings
article

On the plasma etching mechanisms of high aspect ratio aluminum nitride nanowires patterning

Lucas Jaloustre, Erwine Pargon, Saron Sales de Mello, Camille Petit-Etienne, Gwénolé Jacopin, Sebastien Labau
article en

Abstract

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SPIRE - Sciences Po Institutional REpository
Industry, innovation and infrastructure
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Optical Coatings and Gratings
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On the plasma etching mechanisms of high aspect ratio aluminum nitride nanowires patterning — Lucas Jaloustre, Erwine Pargon, et al. · SPIRE - Sciences Po Institutional REpository (2024) | TGRS Research Map | TGRS