Cryogenic bosch process using CF4 plasma in deposition regime

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Journal
SPIRE - Sciences Po Institutional REpository
Published
2025-06-01
Primary Topic
Fusion materials and technologies
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article
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Cryogenic bosch process using CF4 plasma in deposition regime

T. Tillocher, G. Cunge, P. Lefaucheux, L. Becerra et al.
SPIRE - Sciences Po Institutional REpository
Fusion materials and technologies
article

Cryogenic bosch process using CF4 plasma in deposition regime

T. Tillocher, G. Cunge, P. Lefaucheux, L. Becerra, E. Despiau-Pujo, S. Iseni, M. Kogelschatz, R. Dussart, J. Nos
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Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Openalex Percentile: Top 46%
Fusion materials and technologies
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Cryogenic bosch process using CF4 plasma in deposition regime — T. Tillocher, G. Cunge, et al. · SPIRE - Sciences Po Institutional REpository (2025) | TGRS Research Map | TGRS