Multiscale hybrid modeling of DF-CCP CF4 plasmas for carbon resist microlens etching”

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Publication Details

Journal
SPIRE - Sciences Po Institutional REpository
Published
2025-07-20
Primary Topic
Plasma Diagnostics and Applications
Type
article
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article

Multiscale hybrid modeling of DF-CCP CF4 plasmas for carbon resist microlens etching”

G. Cunge, D Ristoiu, P Ducluzaux, E. Despiau-Pujo
SPIRE - Sciences Po Institutional REpository
Plasma Diagnostics and Applications
article

Multiscale hybrid modeling of DF-CCP CF4 plasmas for carbon resist microlens etching”

G. Cunge, D Ristoiu, P Ducluzaux, E. Despiau-Pujo
article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Openalex Percentile: Top 39%
Plasma Diagnostics and Applications
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Multiscale hybrid modeling of DF-CCP CF4 plasmas for carbon resist microlens etching” — G. Cunge, D Ristoiu, et al. · SPIRE - Sciences Po Institutional REpository (2025) | TGRS Research Map | TGRS