Fabrication of superconducting through-silicon vias with photoresist passivation technique

Superconducting through-silicon vias (TSVs), which enable direct signal transmission between circuit layers and reduce spurious coupling, are essential elements in accomplishing a large-scale quantum circuit. However, the widespread adoption of superconducting TSVs has been hindered by fabrication challenges, such as sidewall roughness and complicated process flow. Here, we propose a technique to fabricate superconducting TSVs. With this technique, a single layer of passivated photoresist (PPR) is treated as a hard mask during the Bosch etching process in order to reach an aspect ratio of 20:1 in a 500μm-thick silicon wafer. Compared with other TSV fabrication techniques, using PPR as a hard mask achieves high etching selectivity (80:1), simplifies fabrication process, and yields smooth sidewalls, while remaining compatible with superconducting quantum circuits. To verify superconducting performance, we performed cryogenic measurements on large-diameter TSVs (500μm) that allow uniform aluminum deposition, yielding a critical temperature (TC) of 1.2 K. This technique supports the development of 3D-integrated architectures for superconducting quantum processors, offering a practical pathway toward high-density circuit architectures.