Domestic Fluoropolymer Products for Microelectronic Manufacturing: A Review

Microelectronic manufacturing is characterized by strict requirements for the purity of raw materials and final products, technological processes, equipment, and facilities. This is often achieved through the use of aggressive reagents, which requires equipment and process tools made from chemically resistant materials. They include fluoropolymers (FPs), whose products are used in the technological processes of microelectronic manufacturing. For a long time, the required FP products were supplied from abroad; however, these products are now restricted by sanctions, which has created an urgent need to manufacture them in Russia. Naturally, this calls for an analysis of domestic FP research and production capabilities to address the problems that have arisen. The success of the event depends largely on cooperation and mutual understanding between specialists in microelectronics and fluoropolymer materials, which is the focus of this review. Particular attention is paid to products for filtering aggressive reagents, purifying water and air, collecting and storing samples, and conducting reactions with highly pure chemicals.