Facile Fabrication of Moderate Sensitivity SERS Substrate Using Cu-Plasma Polymer Fluorocarbon Nanocomposite Thin Film

Herein, we propose a simple and cost-effective method for fabricating moderate-sensitivity surface-enhanced Raman scattering (SERS) substrates using Cu-plasma polymer fluorocarbon (Cu-PPFC) nanocomposite films fabricated through RF sputtering. The use of a composite target composed of carbon nanotube (CNT), Cu, and polytetrafluoroethylene (PTFE) powders (5:60–80:35–15 wt%) offers the advantage of the simple fabrication of moderate-sensitivity SERS substrates with a single cathode compared to co-sputtering. X-ray photoelectron spectroscopy (XPS) revealed that the film surface was partially composed of metallic Cu with Cu-F bonds and Cu–O bonds, confirming the coexistence of the conducting and plasmon-active domains. UV-VIS spectroscopy revealed a distinct absorption peak at approximately 680 nm, indicating the excitation of localized surface plasmon resonances in the Cu nanoclusters embedded in the plasma polymer fluorocarbon (PPFC) matrix. Atomic force microscopy and grazing incidence small-angle X-ray scattering analyses confirmed that the Cu nanoparticles were uniformly distributed with interparticle distances of 20–35 nm. The Cu-PPFC nanocomposite film with the highest Cu content (80 wt%) exhibited a Raman enhancement factor of 2.18 × 104 for rhodamine 6G, demonstrating its potential as a moderate-sensitivity SERS substrate. Finite-difference time-domain (FDTD) simulations confirmed the strong electromagnetic field localization at the Cu-Cu nanogaps separated by the PPFC matrix, corroborating the experimentally observed SERS enhancement. These results suggest that a Cu-PPFC nanocomposite film, easily fabricated using a composite target, provides an efficient and scalable route for fabricating reproducible, inexpensive, and moderate-sensitivity SERS substrates suitable for practical sensing applications.