Influence of Deposition Temperature on the Mechanical and Tribological Properties of Cr/Ni Co-Doped Diamond-like Carbon Films

This study aimed to examine the influence of sputtering temperature on the bonding structure and properties of non-hydrogenated chromium/nickel co-doped diamond-like carbon (DLC) films synthesized via direct current magnetron sputtering. The Cr/Ni doping levels in the coatings were regulated by varying the shield opening above a chromium-nickel (20/80 at.%) target, resulting in a total metal co-doping concentration ranging from 6.1 to 8.9 at.%. The thickness of the Cr/Ni-DLC films ranged from 160 to 180 nm. Meanwhile, the deposition temperatures of 185 °C and 235 °C were achieved by adjusting the substrate-to-target distance. The XPS and Raman spectroscopy results indicated enhanced graphitization of the Cr/Ni-DLC films with a decrease in the synthesis temperature. XPS results indicated the formation of carbon-oxide and metal-oxide bonds, with no evidence of metal carbide formation in the doped DLC films. Furthermore, both the nanohardness and Young’s modulus demonstrated significant improvement, while the friction coefficient was reduced more than twice as the deposition temperature increased. These findings provide valuable insights into the influence of deposition temperature on Cr/Ni co-doped DLC films, highlighting their potential as advanced functional coatings.