Frequency-decomposition of complex trajectory for high-speed and precise laser processing using a hybrid galvo-AOD scanning system

This study proposes a frequency-decomposition-based laser processing method for a hybrid scanning system comprising galvanometer scanners (galvos) and acousto-optical deflectors (AODs) to improve the precision and efficiency of laser micro-processing applications. A digital elliptic low-pass filter is designed to decompose the pre-discrete trajectory, which is then optimized according to the field of view of AODs, yielding an optimized galvanometer trajectory and AODs deflection data. By considering the maximum response frequency and maximum acceleration limit of the galvanometer, the allowable processing parameters are determined. Experimental results demonstrate that the proposed method achieves a processing frequency of 190 kHz, with at least a 3.8-fold efficiency improvement over a galvanometer-only processing system while maintaining contour accuracy. The frequency-domain decomposition method provides a practical solution to the complex trajectory decomposition in a hybrid scanning system, offering an effective parameter optimization methodology for industrial high-end manufacturing applications.