Functional 2D MoS2 NEMS resonator array with independent electronic tunability based on mass transfer printing

Resonant nanoelectromechanical systems (NEMS) based on two-dimensional (2D) materials exhibit excellent resonance properties such as a large tuning range, ultralow power, and large dynamic range, leading to broad potential applications in sensing and signal processing. However, scalable fabrication of high-performance 2D NEMS arrays, particularly those with individually addressable electronic control, remains challenging and underexplored. Here, we report a mass transfer printing (MTP) method for the fabrication of large-scale electronically-independent molybdenum disulfide (MoS₂) NEMS resonators with regular isolation spacing. MoS₂ is precisely torn at the edges of polymer protrusions by the surface tension of auxiliary liquid, followed by dry-transfer to the pre-patterned substrate with microtrenches and electrodes. The MTP technique avoids lithographic processes that could lead to collapsing or failure of suspended 2D materials while obtaining electronically independent devices. Characterization of 84 monolayer MoS₂ NEMS resonators demonstrates maintained material quality after transfer, structural integrity, highly tunable resonance frequencies in very-high-frequency (VHF) band, consistent tuning trend of quality (Q) factors, and significant signal-to-noise ratios (SNRs). Independent AC voltage excitation and DC voltage sweeping on different resonators confirm individual electronic control without crosstalk even for neighboring resonators. Furthermore, we design and experimentally demonstrate a functional decimal-to-binary converter building block using adjacent, electrically isolated resonators on a single chip, using gate voltage as input and amplitude at the specific frequency as output. The MTP-fabricated array of independently-addressable MoS₂ resonators advances the large-scale integration of 2D NEMS devices, offering a straightforward and promising pathway for a plethora of applications built upon such device platform.