The Structural Evolution of the CuCl Catalyst during the Direct Synthesis of Trimethoxysilane

CuCl is a commonly used copper-based catalyst for the direct synthesis of trimethoxysilane (M3), which is the primary method for industrial production of M3 monomers. However, the effect of the CuCl catalyst on the phase transitions during the direct synthesis process is not well understood. In this study, we prepared four model CuCl catalysts (CuCl-Y, CuCl-10 min, CuCl-0.5h, and CuCl-1h) by varying the ball-milling duration. Among these, the unmilled CuCl catalyst exhibited the highest M3 selectivity and silicon conversion at 240 °C. During the high-temperature activation stage, the CuCl catalysts underwent phase transformation to form Cu3Si and active Cu species, both of which are catalytically active. When methanol was introduced, the Cu3Si phase contributed to the formation of M3. These results deepen our understanding of the reaction mechanism and offer guidance for designing more efficient catalysts.

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Publication Details

Journal
Industrial & Engineering Chemistry Research
Published
2026-01-02
DOI
https://doi.org/10.1021/acs.iecr.5c03600
Citations
1
Primary Topic
Copper Interconnects and Reliability
Type
article
Field-Weighted Citation Impact
11.44
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article

The Structural Evolution of the CuCl Catalyst during the Direct Synthesis of Trimethoxysilane

Yin‐Lian Zhu, Yan Li, Jiajian Gao, Fabing Su et al.
1 citations
Industrial & Engineering Chemistry Research
Copper Interconnects and Reliability
11.44
article

The Structural Evolution of the CuCl Catalyst during the Direct Synthesis of Trimethoxysilane

Yin‐Lian Zhu, Yan Li, Jiajian Gao, Fabing Su, Ziyi Zhong, Guangwen Xu, Lili Zhang
article en
1 citations

Abstract

CuCl is a commonly used copper-based catalyst for the direct synthesis of trimethoxysilane (M3), which is the primary method for industrial production of M3 monomers. However, the effect of the CuCl catalyst on the phase transitions during the direct synthesis process is not well understood. In this study, we prepared four model CuCl catalysts (CuCl-Y, CuCl-10 min, CuCl-0.5h, and CuCl-1h) by varying the ball-milling duration. Among these, the unmilled CuCl catalyst exhibited the highest M3 selectivity and silicon conversion at 240 °C. During the high-temperature activation stage, the CuCl catalysts underwent phase transformation to form Cu3Si and active Cu species, both of which are catalytically active. When methanol was introduced, the Cu3Si phase contributed to the formation of M3. These results deepen our understanding of the reaction mechanism and offer guidance for designing more efficient catalysts.

Industrial & Engineering Chemistry ResearchVol. 65(1)
Agency for Science, Technology and Research (SG), Institute of Process Engineering (CN), Guangdong Technion-Israel Institute of Technology (CN), Shenyang University of Chemical Technology (CN)
Openalex Percentile: Top 6%
Copper Interconnects and Reliability
11.44
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The Structural Evolution of the CuCl Catalyst during the Direct Synthesis of Trimethoxysilane — Yin‐Lian Zhu, Yan Li, et al. · Industrial & Engineering Chemistry Research (2026) | TGRS Research Map | TGRS