Replication of Rough Patterns on Arbitrarily but Gently Curved Surfaces by Projection Lithography Using a Pair of Faced Paraboloid Mirrors
Projection lithography onto arbitrarily but gently curved surfaces was demonstrated. A faced paraboloid mirror set was used as an exposure tool. To compensate the distortions caused by both the projection optics and the object curvature, the original reticle patterns were modified. As a result, target rough patterns were successfully replicated.
Authors
- Hiroshi Kobayashi (ORCID: https://orcid.org/0000-0002-8124-6269)
- Jun-ya Iwasaki
- Toshiyuki Horiuchi (ORCID: https://orcid.org/0009-0004-9979-7634)
Institutions
- Tokyo Denki University (JP)
Publication Details
- Journal
- IEEJ Transactions on Sensors and Micromachines
- Published
- 2025-12-31
- DOI
- https://doi.org/10.1541/ieejsmas.146.20
- Primary Topic
- Nanofabrication and Lithography Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00