Plasmonic Sensor Based on an MIM Waveguide Coupled with a Ring–Bridge–Rounded Square Resonator

Fano resonance sensors based on metal–insulator–metal (MIM) waveguides often face the challenge of balancing high sensitivity (S) and a high figure of merit (FOM). In this work, a high-performance refractive index sensor is proposed, consisting of a straight MIM waveguide side-coupled to a novel ring–bridge–rounded square (RBS) resonator. The transmission characteristics and the formation mechanism of Fano resonance are systematically analyzed using the finite element method (FEM). The results demonstrate that the synergistic introduction of rounded square units and an internal bridge structure significantly enhances electromagnetic field localization and optimizes the coupling strength. The optimized device achieves a remarkable refractive index sensitivity of 3268 nm/RIU (refractive index unit, RIU) and a high FOM of 55.4. Furthermore, by employing ethanol as the filling medium, the proposed configuration functions as a temperature sensor, exhibiting a high linear sensitivity of 1.644 nm/°C over the range of −70 °C to 70 °C. The proposed RBS resonator holds promise for compact and high-precision nanophotonic sensing applications.