Coplanar Waveguide Sensor for Dimethyl Methyl Phosphonate (DMMP) Vapor Detection at Microwave Frequencies
The development of a palladium-based Coplanar Waveguide (CPW) microwave sensor for detecting Dimethyl methyl phosphonate (DMMP) vapor is designed, fabricated, and tested in this paper. The sensor is fabricated using a thin palladium layer on a planar quartz substrate. Microwave transmission loss variations were used to identify the presence of DMMP vapor in a controlled environment. The presence of 400 parts per million (ppm) DMMP caused detectable changes in the transmission (S21) and admittance (Y11) parameters.
Authors
- J. A. I. Araujo (ORCID: https://orcid.org/0000-0002-7777-1503)
- Brito-Brito Zabdiel
- Sung-min Sim
- M. T. de Melo (ORCID: https://orcid.org/0000-0003-0616-1123)
- Ignacio Llamas-Garro
- Jung-Mu Kim
Publication Details
- Journal
- JSTS Journal of Semiconductor Technology and Science
- Published
- 2025-12-26
- DOI
- https://doi.org/10.5573/jsts.2025.25.6.654
- Primary Topic
- Microwave and Dielectric Measurement Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00