Deterministic hBN Bubbles as a Versatile Platform for Studies on Single‐Photon Emitters

Abstract Single‐photon emitters (SPEs) in 2D materials are highly promising candidates for quantum technologies. SPEs in hexagonal boron nitride (hBN) are widely investigated, but mostly in exfoliated or powder samples that require an activation process, making it difficult to compare studies and reproduce results. Here, this problem is addressed and a platform based on large‐area metalorganic vapor phase epitaxy (MOVPE)‐grown hBN is proposed, which combines reproducibility and scalability with the ability to readily host SPEs without activation. Through the creation of bubbles via electron‐beam irradiation, additional functionalities are achieved, including an interference‐mediated enhancement of emission by approximately 100–200%, dedicated structures that allow the relocation of individual emitters across different systems, and the opportunity to investigate strain‐induced effects. Moreover, in contrast to other gas‐filled bubbles that deflate at low temperatures, the bubbles remain stable under cryogenic conditions, allowing studies as a function of temperature. To improve the control over the shape and position of bubbles, a mask‐based method is demonstrated that enables deterministic control over bubble formation. The presented hBN bubbles constitute a versatile platform for reproducible studies of hBN‐based emitters, providing a reliable insight into their nature and properties.