Design of a resonant pole soft-switching power amplifier for voice coil motor actuation

This paper proposes a switching power amplifier based on a resonant pole inverter for the high-precision, high-bandwidth positioning systems, such as photolithography equipment. First, the proposed topology achieves Zero-Voltage Switching-ON (ZVS-ON) and Quasi-Zero-Voltage Switching-OFF (QZVS-OFF) in the entire load range. It fundamentally eliminates the dead-time effect and current zero-crossing distortion inherent to conventional PWM amplifiers. Second, a comprehensive design for the passive components is established. Third, a hysteresis current control strategy is implemented to ensure a rapid dynamic response and precise current tracking. Experimental results show the amplifier achieves high bandwidth and low output noise, which confirms the feasibility and superiority of the proposed solution.