ALD Reactivity‐Driven 2DEG‐Like Interfacial Conduction in Nanolaminate InGaZnO Transistors toward High‐Mobility and Stable Oxide Electronics
Ki-Woo Song, Yeonhee Lee, Yoon‐Seo Kim, Jonghoon Kim et al.
Journal
Advanced Electronic Materials
Topics
Thin-Film Transistor Technologies
article
ALD Reactivity‐Driven 2DEG‐Like Interfacial Conduction in Nanolaminate InGaZnO Transistors toward High‐Mobility and Stable Oxide Electronics
Ki-Woo Song, Yeonhee Lee, Yoon‐Seo Kim, Jonghoon Kim, Daejung Kim, Hyeong‐Suk Yoo, Young Jae Kim, Jin‐Seong Park
article en
Abstract
No abstract available for this paper.
Publication Tag
Advanced Electronic MaterialsVol. 12(3)
Institutions
AP Systems (South Korea) (KR), Advanced Analysis Center (JP), Hanyang University (KR)
Funders
National Research Foundation, Ministry of Trade, Industry and Energy, Korea Institute for Advancement of Technology, National Research Foundation of Korea, Ministry of Science and ICT, South Korea