Laser-Induced Forward Transfer of Thin Microchiplets in Quasi-Contact Mode
Laser-Induced Forward Transfer's (LIFT) alignment accuracy critically depends upon micro-chiplet's diced edge uniformity and the donor-receiver gap. This research presents chipping-free micro-chiplets fabrication using reactive-ion etching and LIFT printing in quasi-contact achieving excellent transfer accuracies.
Authors
- Geert Van Steenberge (ORCID: https://orcid.org/0000-0001-8574-1235)
- Harindra Kumar Kannojia (ORCID: https://orcid.org/0000-0001-9564-7453)
Institutions
- Imec the Netherlands (NL)
Publication Details
- Published
- 2025-11-12
- DOI
- https://doi.org/10.1109/icsj66986.2025.11302621
- Primary Topic
- Laser Material Processing Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00