Concept of Process Control Based on a Combination of Various Control Actions

The problem of increasing the uniformity of electroplating by creating a concept of combined control of the electrochemical process is considered. A feature of the technological process of electroplating is that their optimal control can be achieved using various control actions. At the first stage of the developed concept, the problem of designing an electrochemical process control system using a single control action is solved. At the second stage, a combination of several control actions is used. At the third stage, a control system is designed based on the best results of solving optimization problems at the first and second stages.