PEALD of SiNx using bis(diethylamino)silane (BDEAS) precursor with N2 plasma

Publication Details

Journal
Portuguese National Funding Agency for Science, Research and Technology (RCAAP Project by FCT)
Published
2025-10-01
Primary Topic
Silicon Nanostructures and Photoluminescence
Type
article
Field-Weighted Citation Impact
0.00
Controls
|||
ALL TIME
JAN
FEB
MAR
APR
MAY
JUN
JUL
AUG
SEP
OCT
article

PEALD of SiNx using bis(diethylamino)silane (BDEAS) precursor with N2 plasma

Portuguese National Funding Agency for Science, Research and Technology (RCAAP Project by FCT)
Silicon Nanostructures and Photoluminescence
article

PEALD of SiNx using bis(diethylamino)silane (BDEAS) precursor with N2 plasma

article en

Abstract

No abstract available for this paper.
Portuguese National Funding Agency for Science, Research and Technology (RCAAP Project by FCT)
Openalex Percentile: Top 50%
Silicon Nanostructures and Photoluminescence
Open Access PDFOpenAlex
AI Navigator

Ask Laika to Summarize, Analyze, and Connect papers live on the map.

Summarize Papers & Methodologies

Extract key findings, datasets, and comparative methods across publications.

Benchmark Rankings & Visual Analytics

Rank top research institutions, authors, funders, topics, and journals by Field-Weighted Citation Impact (FWCI) and paper volume with instant charts.

Connect Distant Disciplines

Bridge topological clusters on the map to find hidden collaborative intersections.

PEALD of SiNx using bis(diethylamino)silane (BDEAS) precursor with N2 plasma · Portuguese National Funding Agency for Science, Research and Technology (RCAAP Project by FCT) (2025) | TGRS Research Map | TGRS