Dependence of Electron Temperature and Density on the Device Type for Atmospheric-Pressure Non-Equilibrium Argon Plasma

Spectra of Ar plasma generated by an atmospheric-pressure plasma jet and an enclosed DBD device were compared. A two-temperature electron energy distribution function (EEDF) is proposed for non-equilibrium argon atmospheric-pressure plasma. Its continuum emission spectrum, dominated by electron-neutral bremsstrahlung radiation, was analyzed to determine the electron temperature (T_e) and density (N_e) by optical emission spectroscopy (OES) measurement. The behavior near the jet electrode showed a similar trend to that of the conventional DBD device when its voltage was altered. Unlike the DBD device, the region outside of the jet's glass tube exhibited a spectrum that could be characterized by a single temperature.