16×1 Linear Vacuum Ultraviolet Photodetector Array Based on Hexagonal Boron Nitride Film

Hexagonal boron nitride (hBN) is a promising material for vacuum ultraviolet (VUV) photodetection, owing to its ultra-wide bandgap and cost-effective synthesis. In this work, 2-inch high-quality hBN films were successfully deposited by magnetron sputtering, and 16×1 linear photodetector arrays were fabricated using a patterned electrode process. The fabricated devices exhibit excellent uniformity, achieving a dark current below 2 pA, a responsivity of 2.665 mA/W, a specific detectivity of 4.831 × 109 Jones, and rise/decay times of 91.31 and 147.25 ms, respectively. Furthermore, clear VUV images were obtained by using the photodetector array as the imaging unit of the imaging system. These results provide a convenient way to construct high-performance linear VUV photodetector arrays based on hBN films, and thus may push forward their future applications.