High-fidelity qubit control in a natural Si-MOS quantum dot using a 300 mm silicon on insulator wafer

We demonstrate high-fidelity single qubit control in a natural Si-MOS quantum dot fabricated in an industrial 300 mm wafer process on a silicon on insulator wafer using electron spin resonance. A relatively high optimal Rabi frequency of 5 MHz is achieved, decoupling the electron spin from its 29Si environment. Tracking the qubit frequency reduces the impact of low-frequency noise in the qubit frequency and improves the TRabi from 7 to 11 μs at a Rabi frequency of 5 MHz, resulting in Q-factors exceeding 50. Randomized benchmarking returns an average single gate control fidelity of 99.5±0.3%. As a result of pulse-area calibration, this fidelity is limited by the Rabi Q-factor. These results show that a fast Rabi frequency and a feedback protocol enable high fidelity in these Si-MOS devices, despite the low-frequency magnetic noise.

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Publication Details

Journal
Applied Physics Letters
Published
2026-10-26
DOI
https://doi.org/10.1063/5.0352438
Primary Topic
Quantum and electron transport phenomena
Type
article
Field-Weighted Citation Impact
0.00

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article

High-fidelity qubit control in a natural Si-MOS quantum dot using a 300 mm silicon on insulator wafer

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Applied Physics Letters
Quantum and electron transport phenomena
article

High-fidelity qubit control in a natural Si-MOS quantum dot using a 300 mm silicon on insulator wafer

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Abstract

We demonstrate high-fidelity single qubit control in a natural Si-MOS quantum dot fabricated in an industrial 300 mm wafer process on a silicon on insulator wafer using electron spin resonance. A relatively high optimal Rabi frequency of 5 MHz is achieved, decoupling the electron spin from its 29Si environment. Tracking the qubit frequency reduces the impact of low-frequency noise in the qubit frequency and improves the TRabi from 7 to 11 μs at a Rabi frequency of 5 MHz, resulting in Q-factors exceeding 50. Randomized benchmarking returns an average single gate control fidelity of 99.5±0.3%. As a result of pulse-area calibration, this fidelity is limited by the Rabi Q-factor. These results show that a fast Rabi frequency and a feedback protocol enable high fidelity in these Si-MOS devices, despite the low-frequency magnetic noise.

Applied Physics LettersVol. 129(17)
University of Cambridge (GB), Ghent University (BE), Bridge University (SS), IMEC (BE), Hitachi (Japan) (JP)
Engineering and Physical Sciences Research Council, Moonshot Research and Development Program
Openalex Percentile: Top 96%
Quantum and electron transport phenomena
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