PECVD of SiON optical thin films and nano-laminates

Publication Details

Journal
SPIRE - Sciences Po Institutional REpository
Published
2025-09-22
Primary Topic
Silicon Nanostructures and Photoluminescence
Type
article
Field-Weighted Citation Impact
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article

PECVD of SiON optical thin films and nano-laminates

SPIRE - Sciences Po Institutional REpository
Silicon Nanostructures and Photoluminescence
article

PECVD of SiON optical thin films and nano-laminates

article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Openalex Percentile: Top 56%
Silicon Nanostructures and Photoluminescence
Open Access PDFOpenAlex
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PECVD of SiON optical thin films and nano-laminates · SPIRE - Sciences Po Institutional REpository (2025) | TGRS Research Map | TGRS